Archives: EUVL Workshops

2022 EUVL Workshop & Supplier Showcase

2022 EUVL Workshop & Supplier Showcase

Proceedings Now Published!

Click Here To View

2022 EUVL Workshop & Supplier Showcase Full Agenda

Agenda Highlights Blog

Agenda Highlights Video Blog

2022 EUVL Workshop & Supplier Showcase Abstract Book

  • Poster Papers
    • “Effect of Wrinkles on Pellicle Reflectivity and Local Critical Dimension” (P37) – Seung Chan Moon, Hanyang University  – First Place Winner
    • “Enhanced EUV Lighting with Optimized C-beam Irradiation” (P49) – Sung Tae Yoo, Kyung Hee University 
    • “Low-Energy Electron Exposure and Dry Etching Characteristics of Hybrid Thin Films Prepared by Molecular Atomic Layer Deposition for EUV Lithography” (P63) – Won-Il Lee, Stony Brook University 
    • “Vapor-phase Infiltration for High-sensitivity Hybrid Nanolithography Resists Synthesis” (P64) – Nikhil Tiwale, Brookhaven National Laboratory – Second Place Winner

Please contact info@euvlitho.com with any questions

2021 EUVL Workshop

2021 EUVL Workshop Proceedings Now Open Access!

The 2021 EUVL Workshop was successfully held online in 2021, with the poster sessions converted to speed presentation sessions. The workshop proceedings have now been published.

  • 2021 EUVL Workshop Best Poster Awards
    • First Place: Luke Long, University of California, Berkeley, “High-speed AFM spatially-resolved, in-situ dissolution rate monitoring”
    • Second Place (Tie): Deuk Gyu Kim, Hanyang University, “Phase and amplitude optimization for EUV mask imaging performance enhancement”
    • Second Place (Tie): Yuka Esashi, University of Colorado at Boulder, “Phase-Sensitive EUV Imaging Reflectometry for Depth-Dependent Composition Determination”
  • Blog on Agenda Highlights, IMEC Program Showcase and a new short course on Advanced Nanoscale Imaging and EUVL

2021 EUVL Supplier Showcase

EUV Litho, Inc., together with EUV-IUCC, successfully organized the 2021 EUVL Supplier Showcase on August 16- 17, 2021. In this workshop, suppliers as well as non-profit institutions made presentations about their products and services related to EUVL.

Please reach out to us at info@euvlitho.com with any questions.

  • 2021 EUVL Supplier Showcase Speakers
    • Debbie Gustafson (Energetiq) – Keynote Presenter
    • Philipp Naujok (optiXfab) – Tutorial Presenter
    • Marcel Demmler (scia Systems Gmbh)
    • Jinho Ahn (EUV-IUCC)
    • Warren Montgomery (IM)
    • Meng Lee (Veeco)
    • Charles Tarrio (NIST)
    • Peter Oberta (Rigaku)
    • Satinder Sharma (IIT Mandi)
    • Norbert Koster (TNO)
    • Slava Medvedev (ISAN)
    • Ryan Miyakawa (CXRO / LBL)
    • George Atanasoff (AccuStrata)
    • Jochen Vieker (Fraunhofer)
    • Iacopo Mochi (PSI)
    • Michael Kolbe (PTB)
    • Sangsul Lee ( Pohang Accelerator Laboratory)
    • Yusuke Suzuki (DNP)
    • Sung Wong Choi (FSTC)
    • Sung Park (Molecular Vista)
    • Matthew Harada (K&M Lab)
    • Supriya Jaiswal (Astrileux)
    • Please see the complete list of speakers in the final agenda

Introducing the EUVL Supplier Showcase: an Amazing Way to Learn Directly from Suppliers about the Newest and Best Products and Services for the EUVL Infrastructure (Blog Post)

EUVL Supplier Showcases are organized by the EUVL Infrastructure Supplier Board.