Torsten Feigl (optiXfab)
Debbie Gustafson (Energetiq)
Meng Lee (Veeco)
Warren Montgomery (Irresistible Materials)
Peter Oberta (Rigaku Innovative Technologies Europe)
Jinho Ahn (Hanyang University and EUV-IUCC, Co-chair)
Vivek Bakshi (EUV Litho, Inc., Chair)