2022 EUVL Workshop & Supplier Showcase
Proceedings Now Published!
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2022 EUVL Workshop & Supplier Showcase Full Agenda
2022 EUVL Workshop & Supplier Showcase Abstract Book
- Poster Papers
- “Effect of Wrinkles on Pellicle Reflectivity and Local Critical Dimension” (P37) – Seung Chan Moon, Hanyang University – First Place Winner
- “Enhanced EUV Lighting with Optimized C-beam Irradiation” (P49) – Sung Tae Yoo, Kyung Hee University
- “Low-Energy Electron Exposure and Dry Etching Characteristics of Hybrid Thin Films Prepared by Molecular Atomic Layer Deposition for EUV Lithography” (P63) – Won-Il Lee, Stony Brook University
- “Vapor-phase Infiltration for High-sensitivity Hybrid Nanolithography Resists Synthesis” (P64) – Nikhil Tiwale, Brookhaven National Laboratory – Second Place Winner
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