2021 Source Workshop

• • 2021 Source Workshop Proceedings are Now Open Access!
  • 2021 Source Workshop Final Agenda PDF
  • 2021 Source Workshop Poster / Speed Presentation Session Award Winners
    • 1st Place: Javier Hernandez-Rueda, ARCNL – “Tailoring the Expansion-to-Propulsion Ration of Laser-induced Tin Targets for Extreme-ultraviolet Nanolithography” –S76
    • 2nd Place (Tie):  Sung Tae Yoo, Kyung Hee University – “Fabrication of EUV Light Source with Cold-Cathode Electron Beam (C-beam)” – S75
    • 2nd Place (Tie):  Yuto Nakayama, Utsunomiya University – “Charge-separated Ion Spectra in Laser-produced Sn Plasma” – S48
  • 2021 Source Workshop Abstract Book
  • 2021 Source Workshop List of Topics
  • 2021 EUV Sn LPP Code Comparison
    • 2021 EUV Code Comparison Proposal (Version October 5, 2021)
      • Please review the problem conditions and output specifications carefully!
    • Code Comparison Example Data sets
      • From Howard Scott
        • sn512.cretin_C2, ssr2.8.cretin_C2, tdr2.8.cretin_C2  (Posted October 6, 20021)
        • Example data file for problem 3 — 1  (Posted October 12, 2021)
    • Code Comparison – Problem 3 – Submitted Results Data Files (for others to download and view)
      • Howard Scott – Set 1:  1    2    3 (Posted October 12, 2021) Set 2:  1    2     3 (Posted October 12, 2021)
      • Igor Golovkin : 1  2  3 (Updated October 16, 2021)
      • Mikhail Basko 1  2  3  (Posted October 14, 2021)
      • Katsunobu Nishahara 1  2  3  (Posted October 22, 2021)

• Keynote Presentations
  • Margaret Murnane (University of Colorado, Boulder and K&M Labs)
  • Takeo Watanabe (University of Hyogo)
  • Hakaru Mizoguchi (Gigaphoton)
  • Marcelo Ackermann (University of Twente)
• Confirmed Invited Speakers
  • • Farhat Beg (University of San Diego)
    • Ahmed Diallo (Princeton – PPL)
    • Peter Kraus (ARCNL)
    • Norbert Koster (TNO)
    • James Colgan (LANL)
    • Chuanxiang Tang (Tsinghua University)
    • Sascha Brose (RWTH- Aachen University)
    • Thomas Metzger (Trumpf)
    • Yusuke Teramoto (Ushio)
    • Valeryi Sizyuk (Purdue)
    • Muharrem Bayraktar (University of Twente)
    • Qais Saadeh / Frank Sholze (PTB)
    • Slava Medvedev (ISAN)
    • Norio Nakamura (KEK)
    • Fergal O’Reilly (UCD)
    • Stephan Fritzsche (Helmholtz Institut, Jena)
    • Evan Davis (ASML)
    • Ronnie Hoekstra (ARCNL)
    • Takeshi Higashiguchi (Utsunomia University)
    • Jochen Vieker (ILT, Fraunhofer)
    • Kentaro Tomita (Hokudai University)
    • Reza Abhari (ETHZ)
    • Martin Smrz (HiLASE)
    • Brendan Reagan (LLNL)
    • David Reisman (Energetiq)
    • Lixin Yan (Tsinghua University)