2021 EUVL Workshop Proceedings Now Open Access!
The 2021 EUVL Workshop was successfully held online in 2021, with the poster sessions converted to speed presentation sessions. The workshop proceedings have now been published.
- 2021 EUVL Workshop Best Poster Awards
- First Place: Luke Long, University of California, Berkeley, “High-speed AFM spatially-resolved, in-situ dissolution rate monitoring”
- Second Place (Tie): Deuk Gyu Kim, Hanyang University, “Phase and amplitude optimization for EUV mask imaging performance enhancement”
- Second Place (Tie): Yuka Esashi, University of Colorado at Boulder, “Phase-Sensitive EUV Imaging Reflectometry for Depth-Dependent Composition Determination”
- Blog on Agenda Highlights, IMEC Program Showcase and a new short course on Advanced Nanoscale Imaging and EUVL
