Source Workshop will be held in June together with EUVL Workshop

Starting in 2025, the annual Source Workshop, usually held in October, will be held together with EUVL Workshop in June. Please visit our homepage (www.euvlitho.com) to view the First Call for Papers for the combined “EUVL and Source Workshop.” We are excited about this new arrangement, which will bring together the Source and EUVL communities for greater collaboration.