2023 Source Workshop

We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.

Proceedings are now published!  

Click Here to Purchase Proceedings

Click Here for the Final Agenda

Click Here for the Abstract Book

Click Here for the Abstract Template


First Place

“Mitigation of Polarization-Dependent Uncertainties in a Compact EUV Spectrometer”

Sophia Schröder- RWTH Aachen University

Second Place

“Vaporization Dynamics of Liquid Tin Sheet Targets”

Karl Schubert- ARCNL

Special Mention

“TEUS: High-Brightness EUV LPP Light Source Based on Fast Rotating Target. Product Overview and Specifications”

Alexander Toustopyat- ISTEQ