The workshop was successfully held from July 13-17, 2009 at Sheraton Waikiki, Honolulu, Oahu, Hawaii, USA. The proceedings of this workshop are available at no cost for download at:
- Workshop Proceedings – 2009 International Workshop on EUV Lithography
- Agenda: 2009 International Workshop on EUV Lithography
- Abstracts: 2009 International Workshop on EUV Lithography
- 2009 EUVL Workshop Award Ceremony
An article with highlights from the 2009 EUVL workshop is available at:
Other perspectives on the EUVL Workshop can be found at:
- Tropical Topical Lithography: Litho Guru Perspective
- Top-10-Facts Gleaned at EUV Lithography Workshop
- Fiber Lasers for Extreme Photons
