EUVL Workshop Steering Committee

EUVL Workshop  and Supplier Showcase Steering Committee

Jinho Ahn (Hanyang University)
Gregory Denbeaux (University of Albany)
Padraig Dunne (University College Dublin)
Yasin Ekinci (PSI)
Torsten Feigl (optiX fab)
Emily Gallagher (IMEC)
Gregg Gallatin (Applied Math Solutions)
Debbie Gustafson (Energetiq)
Larissa Juschkin (KLA)
Winfried Kaiser (Carl Zeiss)
Harry Levinson (HJL Lithography)
Ted Liang (Intel)
Changmoon Lim (Hynix)
Sascha Migura (Carl Zeiss)
Patrick Naulleau (LBNL)
Ladislav Pina (Czech Technical University)
Abbas Rastegar (Applied Materials)
Kurt Ronse (IMEC)
Craig Siders (LLNL)
Sam Sivakumar (Intel)
Kuen-Yu Tsai (National Taiwan University)
Oscar Versolato (ARCNL)
Takeo Watanabe (Hyogo University)
Jim Wiley (Wiley Strategic Solutions)
Tony Yen (ASML)

Organizing Chair

Vivek Bakshi (EUV Litho, Inc.)