Blue – X Sub TWGs Launched, Feb. 10 – 12, 2024 !
We are excited to announce the successful launch of nine Sub Technical Working Groups (sub TWGs) within the Blue-X Consortium from February 10-12, 2025! Led by industry experts, these groups will delve into various areas including Imaging, Resist, Mask, ML Optics, Sources and more, aiming to pave the way for advanced lithography below 13.5 nm. With the Consortium now boasting 57 members and approximately 150 assignees, including recent additions like Corning, PSI, Merck and TEL, the collaborative efforts are set to push the boundaries of technology. The meeting agenda, exclusively for members, can be accessed through the provided link. Let’s embark on this journey together as we delve into the next phase of technology advancement, driving the extension of Moore’s Law!
- Next Blue-X TWG Meetings
- April 15 (Online) and
- June 23, 2025 (In-person)
Previously: Blue -X Consortium Successfully Launched!
EUV Litho Inc. is pleased to announce Phase I of Blue-X, a consortium to investigate the potential of optical projection lithography in the wavelength region of 2–7 nm. The consortium was formally revealed during the 2024 Source Workshop in Amsterdam this October.
During Phase I, Blue-X is being organized as a technical working group (TWG), with sub- groups being formed in the areas of Source, Optics, Mask, Imaging and Resist. We currently have 37 organizations as members, including chip makers, original equipment manufacturers (OEMs), a university and national labs. These members have assigned approximately 110 professionals to participate in this TWG. We expect additional organizations to join and the number of TWG members to increase!
The first meeting of Blue-X TWG was held on Dec. 10 via Zoom. Meeting recording and presentations are available to Blue-X TWG members. Future periodic meetings will also be offered on Zoom, with an in-person gathering in June during the 2025 EUVL and Source Workshop at MIT LL.
If your organization is interested in finding out more about Blue-X, please contact us at info@euvlitho.com to request a copy of the White Paper. The process of joining the TWG is very simple and we will be happy to help you with it. The organizations, joining the TWG after December 10, 2024, will still have access to meeting proceedings and technical information produced by the TWG.