About Us

Founded by Dr. Vivek Bakshi, EUV Litho, Inc. is an organization that promotes EUV Lithography via consulting, workshops, and educational programs. EUV Litho, Inc. is also responsible for organizing the annual EUVL Workshop  & Supplier Showcase, annual Source Workshop and global EUVL Short Courses. Please visit our home page to find out about our current events.

You can find our latest events by clicking here.


Dr. Vivek Bakshi- Founder and President

Dr. Vivek Bakshi founded EUV Litho, Inc. in 2007. In addition to organizing the conferences hosted by EUV Litho, Inc, he provides consulting services in the areas of EUV lithography (EUVL) and general lithography to investors, funding agencies, universities, national labs and suppliers.

Currently, Dr. Bakshi is an Adjunct Professor in the School of Physics, University College Dublin, Ireland. He is a member of the Editorial board and Associate Editor of JM3 (SPIE Journal of Micro/Nano Lithography, MEMS and MOEMS). Previously, he was a Senior Member of the Technical Staff in SEMATECH’s Lithography Division. Recognized as an expert in EUV source technology on a global scale, he is widely quoted in trade media on EUVL-related topics and runs a frequently updated blog about EUVL.

Dr. Bakshi holds three US patents in the area of EUVL. He has also authored/co-authored over 125 technical publications, including book chapters, articles in peer-reviewed journals, technical reports, and trade publications. He has published four books on EUVL: EUV Sources for Lithography (SPIE Press, 2006), EUV Lithography (SPIE Press and John Wiley, 2008), Extreme Ultraviolet Lithography (SPIE Press, 2012 (co-edited with Anthony Yen) and his SPIE press bestseller EUV Lithography – 2nd Edition (SPIE Press, February 2018). Currently, he is currently working on several additional books on the topics related to EUVL. Further details and interests can be reviewed on his LinkedIn page. You can reach him via email at vivek.bakshi@euvlitho.com.

Administrative Assistant

Please reach out to EUV Litho admin at admin@euvlitho.com.

Contact Information

EUV Litho, Inc.
10202 Wommack Road
Austin, TX 78748, USA

512-462-2290 (O)

Additional Contact Information

ADMINISTRATIVE ASSISTANT
admin@euvlitho.com

TECHNICAL INFORMATION
vivek.bakshi@euvlitho.com

REGISTRATION INFORMATION
info@euvlitho.com