- 2022 EUV Lithography Short Course
- October 22nd, 2022; 7 AM – 2 PM (CDT)
- Instructors:
- Vivek Bakshi (EUV Litho, Inc.)
- Jinho Ahn (Hanyang University)
- Patrick Naulleau (CXRO, LBL)
- Sascha Migura (Carl Zeiss) – Guest Instructor
- Registration for this course is now closed. The EUV & Soft X-Ray Short Course will be offered again in 2023