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Blue-X Consortium Launching with First Meeting on December 10, 2024!

EUV Litho Inc. is pleased to announce Phase I of Blue-X, a consortium to investigate the potential of optical projection lithography in the wavelength region of 2–7 nm. The consortium was formally revealed during the 2024 Source Workshop in Amsterdam this October.

During Phase I, Blue-X is being organized as a technical working group (TWG), with sub- groups being formed in the areas of Source, Optics, Mask, Imaging and Resist. We currently have 19 organizations as members, including chip makers, original equipment manufacturers (OEMs), a university and national labs. These members have assigned approximately 45 professionals to participate in this TWG. We expect additional organizations to join and the number of TWG members to increase.

The first meeting of Blue-X TWG will be held on Dec. 10 via Zoom. Future periodic meetings will also be offered on Zoom, with an in-person gathering in June during the 2025 EUVL and Source Workshop at MIT LL.

If your organization is interested in finding out more about Blue-X, please contact us at info@euvlitho.com to request a copy of our White Paper. There is still time for you to join the first launch meeting on Dec. 10.