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2024 EUVL Workshop and Supplier Showcase

2024 EUVL Workshop and Supplier Showcase was successfully held from June 2-6 at LBNL, Berkeley, CA. The workshop proceedings will be published on this website by July 10, 2024.  

2024 EUVL Workshop and Supplier Showcase Final Agenda

2024 EUVL Workshop and Supplier Showcase Abstract Book

Keynote Speakers

Marcelo Ackermann, University of Twente

Steven Carson, Intel

In-Yong Kang, Samsung

Jan van Schoot, ASML

John Shalf, LBL

Steve Snyder, Micron

Takeo Watanabe, University of Hyogo

For List of Invited, Regular and Poster Papers, Please See the Final Agenda

Workshop Links

Final Call for Papers

Abstract Template

Agenda Outline

EUV and Soft Xray Short Course

EUVL Short Course

2024 Source Workshop: First Call for Papers

     We are happy to announce the First Call for Papers for our 2024 Source Workshop which will be held in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. Abstracts are due by August 16th. We hope to see you there! 

Click Here for First Call for Papers!

We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.  

 Purchase Proceedings

 

Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.

Click here to view past EUVL Workshops & Supplier Showcases