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 2024 Source Workshop: Final Agenda Announced!

Register today!

The 2024 Source Workshop will be held this year in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. The Final Agenda and the Abstracts Book for the workshop is now available at the links below. The workshop will be held in-person only, from Monday, October 21 – Wednesday, October 23, 2024. However, the short courses on October 19 – 20, 2024, will be held only on-line via Zoom. Please contact us at info@euvlitho.com with any questions. We hope to see you at the 2024 Source Workshop! 

• 2024 Source Workshop Final Agenda
• 2024 Source Workshop Abstracts Book
• 2024 Source Workshop List of Accepted Papers
• 2024 Source Workshop Early Registration and Sponsorship
• Short Courses (Held On-line only)
  • EUVL Short course (October 19, 2024): Course Description  Registration
  • EUV and Soft X-ray Sources (October 20, 2024): Course Description  Registration
• First Call for Papers – Instructions for abstract submission
  • Download Template for Abstracts
• 2024 Source Workshop Agenda Outline
• Poster Presentation Instructions
• 2024 Source Workshop Hotel and Transportation Information (UPDATED INFORMATION)
• List of Speakers for Accepted Presentations
  •  Keynote Presentations
  • Torsten Feigl (optiXfab)
  • Manuel Guizar-sicairos (PSI)
  • Konstantin Koshelev (ISTEQ)
  • Peter Moulton (MIT Lincoln Lab)
  • Jan van Schoot (ASML)
  •  Invited Presentations
    Please see list of accepted Papers
• Source Workshop Registration and Sponsorship