2024 Source Workshop Proceedings Published!
The 2024 Source Workshop was successfully held this year in Amsterdam, The Netherlands. The workshop proceedings are now available at the link below. Please contact us at info@euvlitho.com with any questions!
- 2024 Source Workshop Proceedings
- 2024 Source Workshop Final Agenda
- 2024 Source Workshop Abstracts Book
- Photographs from workshop coming soon!
2024 EUVL Workshop and Supplier Showcase
2024 EUVL Workshop and Supplier Showcase was successfully held from June 2-6 at LBNL, Berkeley, CA. We are happy to announced the publication of the workshop proceedings!
- 2024 EUVL Workshop and Supplier Showcase Proceedings
- 2024 EUVL Workshop and Supplier Showcase Photographs
- 2024 EUVL Workshop and Supplier Showcase Final Agenda
- 2024 EUVL Workshop and Supplier Showcase Abstract Book
Keynote Speakers
Marcelo Ackermann, University of Twente
Steven Carson, Intel
In-Yong Kang, Samsung
Jan van Schoot, ASML
John Shalf, LBL
Steve Snyder, Micron
Takeo Watanabe, University of Hyogo
For List of Invited, Regular and Poster Papers, Please See the Final Agenda
We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.
Purchase Proceedings
Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.
PROCEEDINGS NOW PUBLISHED
For a full overview of the workshop, visit the 2023 EUVL Workshop and Supplier Showcase page.
Click here to view past EUVL Workshops & Supplier Showcases