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 2024 Source Workshop: Final Agenda Announced!

Register today!

The 2024 Source Workshop will be held this year in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. The Final Agenda and the Abstracts Book for the workshop is now available at the links below. The workshop will be held in-person only, from Monday, October 21 – Wednesday, October 23, 2024. However, the short courses on October 19 – 20, 2024, will be held only on-line via Zoom. Please contact us at info@euvlitho.com with any questions. We hope to see you at the 2024 Source Workshop! 

2024 EUVL Workshop and Supplier Showcase

2024 EUVL Workshop and Supplier Showcase was successfully held from June 2-6 at LBNL, Berkeley, CA. We are happy to announced the publication of the workshop proceedings!  

Keynote Speakers

Marcelo Ackermann, University of Twente

Steven Carson, Intel

In-Yong Kang, Samsung

Jan van Schoot, ASML

John Shalf, LBL

Steve Snyder, Micron

Takeo Watanabe, University of Hyogo

For List of Invited, Regular and Poster Papers, Please See the Final Agenda

We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.  

 Purchase Proceedings

 

Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.

Click here to view past EUVL Workshops & Supplier Showcases