2024 Source Workshop: Final Agenda Announced!
Register today!
The 2024 Source Workshop will be held this year in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. The Final Agenda and the Abstracts Book for the workshop is now available at the links below. The workshop will be held in-person only, from Monday, October 21 – Wednesday, October 23, 2024. However, the short courses on October 19 – 20, 2024, will be held only on-line via Zoom. Please contact us at info@euvlitho.com with any questions. We hope to see you at the 2024 Source Workshop!
- 2024 Source Workshop Final Agenda
- 2024 Source Workshop Abstracts Book
- 2024 Source Workshop List of Accepted Papers
- 2024 Source Workshop Early Registration and Sponsorship
- Short Courses (Held On-line only)
- EUVL Short course (October 19, 2024): Course Description Registration
- EUV and Soft X-ray Sources (October 20, 2024): Course Description Registration
- First Call for Papers – Instructions for abstract submission
- 2024 Source Workshop Agenda Outline
- Poster Presentation Instructions
- 2024 Source Workshop Hotel and Transportation Information (UPDATED INFORMATION)
- List of Speakers for Accepted Presentations
- Keynote Presentations
- Torsten Feigl (optiXfab)
- Manuel Guizar-sicairos (PSI)
- Konstantin Koshelev (ISTEQ)
- Peter Moulton (MIT Lincoln Lab)
- Jan van Schoot (ASML)
- Invited Presentations
Please see list of accepted Papers
- Source Workshop Registration and Sponsorship
2024 EUVL Workshop and Supplier Showcase
2024 EUVL Workshop and Supplier Showcase was successfully held from June 2-6 at LBNL, Berkeley, CA. We are happy to announced the publication of the workshop proceedings!
- 2024 EUVL Workshop and Supplier Showcase Proceedings
- 2024 EUVL Workshop and Supplier Showcase Photographs
- 2024 EUVL Workshop and Supplier Showcase Final Agenda
- 2024 EUVL Workshop and Supplier Showcase Abstract Book
Keynote Speakers
Marcelo Ackermann, University of Twente
Steven Carson, Intel
In-Yong Kang, Samsung
Jan van Schoot, ASML
John Shalf, LBL
Steve Snyder, Micron
Takeo Watanabe, University of Hyogo
For List of Invited, Regular and Poster Papers, Please See the Final Agenda
We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.
Purchase Proceedings
Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.
PROCEEDINGS NOW PUBLISHED
For a full overview of the workshop, visit the 2023 EUVL Workshop and Supplier Showcase page.
Click here to view past EUVL Workshops & Supplier Showcases