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2024 Source Workshop

The 2024 Source Workshop was successfully held this year in Amsterdam, The Netherlands. The workshop proceedings will be published on this website by Monday November 25, 2024. Please contact us at info@euvlitho.com with any questions!

2024 EUVL Workshop and Supplier Showcase

2024 EUVL Workshop and Supplier Showcase was successfully held from June 2-6 at LBNL, Berkeley, CA. We are happy to announced the publication of the workshop proceedings!

Keynote Speakers

Marcelo Ackermann, University of Twente

Steven Carson, Intel

In-Yong Kang, Samsung

Jan van Schoot, ASML

John Shalf, LBL

Steve Snyder, Micron

Takeo Watanabe, University of Hyogo

For List of Invited, Regular and Poster Papers, Please See the Final Agenda

We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.