2024 EUVL Workshop and Supplier Showcase
2024 EUVL Workshop and Supplier Showcase was successfully held from June 2-6 at LBNL, Berkeley, CA. The workshop proceedings will be published on this website by July 10, 2024.
2024 EUVL Workshop and Supplier Showcase Final Agenda
2024 EUVL Workshop and Supplier Showcase Abstract Book
Keynote Speakers
Marcelo Ackermann, University of Twente
Steven Carson, Intel
In-Yong Kang, Samsung
Jan van Schoot, ASML
John Shalf, LBL
Steve Snyder, Micron
Takeo Watanabe, University of Hyogo
For List of Invited, Regular and Poster Papers, Please See the Final Agenda
Workshop Links
2024 Source Workshop: First Call for Papers
We are happy to announce the First Call for Papers for our 2024 Source Workshop which will be held in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. Abstracts are due by August 16th. We hope to see you there!
Click Here for First Call for Papers!
We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.
Purchase Proceedings
Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.
PROCEEDINGS NOW PUBLISHED
For a full overview of the workshop, visit the 2023 EUVL Workshop and Supplier Showcase page.
Click here to view past EUVL Workshops & Supplier Showcases