Home

Final Call For Papers

     We would like to announce the (instructions for submission of abstracts) Final Call for Papers for our 17th annual 2024 EUVL Workshop and Supplier Showcase in June at CXRO, LBL, Berkeley, CA. The focus of the upcoming workshop is on the lowering of k1 value, EUVL infrastructure, and address challenges for high-NA EUVL scanners, and evaluating technical options beyond high-NA. We look forward to this year’s workshop and hope to see you there!

Keynote Speakers

Marcelo Ackermann, University of Twente

Steven Carson, Intel

In-Yong Kang, Samsung

Jan van Schoot, ASML

John Shalf, LBL

Steve Snyder, Micron

Takeo Wantanabe, University of Hyogo

Invited Speakers

Jinho Ahn, Hanyang

Felicie Albert, LLNL

Tom Albrecht, Molecular Vista

Chris Anderson, Xlight

Daniel Arcaro, Energetiq

Paul Ashby, LBL

Marcus Benk, CXRO

Henry Chou, Energetiq

Richard Ciesielski, PTB

Congque Dinh, TEL

Iason Giannopoulos, PSI

Matt Hettermann, EUV Tech

Erik Hosler, Xlight

Martin Kaumanns, Carl Zeiss

Henry Kapteyn, K&M Labs

Myung-Gil Kim, Sungkyunkwan University

Oleg Kostko, CXRO

Michael Lam, Synopsys

Dong Gun Lee, E-Sol

Meng Lee, Veeco

Sangsul Lee, Postech

Luke Long, EUV Tech

Steve Milton, Tau Systems

Ryan Miyakawa, CXRO

Chang-Yong Nam, Brookhaven National Lab

Dinh Nguyen, Xlight

Chris Ober, Cornell/ NSF

Zhilong Pan, Tsinghua University

Alex Robinson, Irresistible Materials

Katrina Rook, Veeco

Ricardo Ruiz, LBL

Maurice Garcia-Sciveres, LBL

John Shalf, LBL

Stuart Sherwin, EUV Tech

Micheal Shifrin, AMAT

Adam Schwartzberg, LBL

Anuja De Silva, LAM

Prof. Sung, Hanyang University

Jeroen van Tilborg, LBL

Micheal Tsapatsis, John Hopkins University

Jacqueline van Veldhoven, TNO

Cheng Wang, LBL

Workshop Links

Register and Sponsor 2024 EUVL Workshop and Supplier Showcase

Final Call for Papers

Abstract Template

Agenda Outline

Lodging Information

2024 Source Workshop: First Call for Papers

     We are happy to announce the First Call for Papers for our 2024 Source Workshop which will be held in Amsterdam, The Netherlands. This leading annual workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. Abstracts are due by August 16th. We hope to see you there! 

Click Here for First Call for Papers!

We are happy to announce the publication of the proceedings for the 2023 Source Workshop held in Aachen, Germany from October 21-25, 2023. This year, we experienced our largest turnout and are looking forward to next year’s workshop to be held at ARCNL. We thank all who were involved in contributing to this year’s great success.  

 Purchase Proceedings

 

Our 16th annual EUVL Workshop and Supplier Showcase has now concluded.

The 2022 Source Workshop was a successful gathering of the EUVL community.

PROCEEDINGS NOW PUBLISHED

For a full overview of the workshop, visit the 2022 Source Workshop page.

Click here to view past EUVL Workshops & Supplier Showcases