We are happy to announce the final agenda for the 2014 International Workshop for EUV and Soft X-ray Sources. The agenda can be downloaded at the link below.
Abstracts will be published soon on this website. We are still accepting abstracts for post-deadline poster papers until October 15, 2014.
Due to overlap with another large workshop in the Dublin area from November 3-6, 2014, participants are encouraged to make hotel reservations as soon as possible. Hotel information is given at the link below:
Please contact us at Info@euvlitho.com, if you need a travel visa in order to travel to Ireland.
Keynote Speakers and Special Sessions
Mark Phillips (Intel Corporation)
Hakaru Mizoguchi (Gigaphoton)
Carolyn Larabell (University of California at San Francisco)
In the 2014 Source Workshop, we have special sessions on FEL sources for Lithography and Water window microscopy.
2014 EUVL Workshop Proceedings
The 2014 EUVL Workshop was successfully held from June 23-27, 2014 at Makena Beach Golf Resort, Maui, Hawaii, USA. The workshop proceedings and workshop summary can be downloaded at links below.