We are happy to announce the agenda for the 2015 International Workshop on EUV Lithography (EUVL Workshop), to be held June 15-19, 2015 at the Makena Beach Golf Resort in Maui, Hawaii. This workshop, now in its eighth year, is focused on the fundamental science of EUV Lithography (EUVL). A smaller group setting suitable for networking and brainstorming, with a focus on fundamentals, sets this conference apart from other larger conferences based on the commercial aspects of EUVL. A short course on EUV Lithogrpahy will be offered on June 15, 2015. The deadline for submission of abstracts for post deadline poster paper is May 30, 2015. The deadline for registration, without late fee, is May 11, 2015.
The 2014 International Workshop for EUV and Soft X-ray Sources was successfully held from November 3-6, 2014. The workshop summary, proceedings, agenda and the abstract book can be downloaded at the links below.