The 2014 International Workshop for EUV and Soft X-ray Sources was successfully held from November 3-6, 2014. The workshop summary and proceedings will be published on this website by November 30, 2014. The agenda and the abstract book can be downloaded at the link below.
Mark Phillips (Intel Corporation)
Hakaru Mizoguchi (Gigaphoton)
Carolyn Larabell (University of California at San Francisco)
In the 2014 Source Workshop, we had special sessions on FEL sources for Lithography and Water window microscopy.
2014 EUVL Workshop Proceedings
The 2014 EUVL Workshop was successfully held from June 23-27, 2014 at Makena Beach Golf Resort, Maui, Hawaii, USA. The workshop proceedings and workshop summary can be downloaded at links below.